(19)

(11)

EP 4 100 985 A1

(12)

(43) Date of publication: 14.12.2022 Bulletin 2022/50 (21) Application number: 21708080.3 (22) Date of filing: 05.02.2021

(51) International Patent Classification (IPC):  H01J 37/22(2006.01) H01J 37/28(2006.01) (52) Cooperative Patent Classification (CPC): H01J 37/228; H01J 37/28; H01J 2237/226 (86) International application number: PCT/NL2021/050075 (87) International publication number: WO 2021/158111 (12.08.2021 Gazette 2021/32)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 07.02.2020 NL 2024861 (71) Applicants: Technische Universiteit Delft 2628 CN Delft (NL) DELMIC IP B.V. 2628 EB Delft (NL)	(72) Inventors: DEN HOEDT, Sander 2628 EB Delft (NL) HOOGENBOOM, Jacob Pieter 2628 EB Delft (NL) LANE, Ryan Irwin 2628 EB Delft (NL) SRINIVASA RAJA, Aditi 2628 EB Delft (NL) (74) Representative: Peters, Sebastian Martinus et al Octrooibureau Vriesendorp & Gaade B.V. Koninginnegracht 19 2514 AB Den Haag 2514 AB Den Haag (NL)