(19)

(11)

EP 4 104 202 A1

(12)

(43) Date of publication: 21.12.2022 Bulletin 2022/51 (21) Application number: 21710686.3 (22) Date of filing: 10.02.2021

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) C30B 29/40(2006.01) H01L 29/20(2006.01) C30B 29/38(2006.01) H01L 29/04(2006.01) (52) Cooperative Patent Classification (CPC): C30B 7/105; C30B 29/406; H01L 21/02458; H01L 21/02516; H01L 21/0254; H01L 21/02609; H01L 21/0262; H01L 29/0646; H01L 29/2003; H01L 29/7788; H01L 29/8613; H01L 33/025; H01L 29/861; H01L 33/32; H01L 21/02389; H01L 21/02433; H01L 21/02428; H01L 21/02658; H01L 21/0259; H01L 21/02647 (86) International application number: PCT/US2021/017514 (87) International publication number: WO 2021/163230 (19.08.2021 Gazette 2021/33)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 11.02.2020 US 202062975078 P 07.04.2020 US 202063006700 P 22.05.2020 US 202016882219 (71) Applicant: SLT Technologies, Inc. Los Angeles, CA 90067 (US)	(72) Inventors: CARDWELL, Drew Los Angeles, California 90067 (US) D'EVELYN, Mark P. Los Angeles, California 90067 (US) (74) Representative: Biggi, Cristina  Bugnion S.p.A. Viale Lancetti 17 20158 Milano 20158 Milano (IT)