(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
02.04.2020 US 202016838997 23.09.2020 US 202017030187
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(71) |
Applicant: Versum Materials US, LLC |
|
Tempe, AZ 85284 (US) |
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(72) |
Inventors: |
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- MACDONALD, Matthew R.
Tempe, AZ 85284 (US)
- LEHMANN, John J.
Tempe, AZ 85284 (US)
|
(74) |
Representative: Sommer, Andrea |
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Andrea Sommer
Patentanwälte PartG mbB
Uhlandstraße 2 80336 München 80336 München (DE) |
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