(19)
(11) EP 4 110 968 A1

(12)

(43) Date of publication:
04.01.2023 Bulletin 2023/01

(21) Application number: 20928695.4

(22) Date of filing: 25.09.2020
(51) International Patent Classification (IPC): 
C23C 16/40(2006.01)
C07F 7/21(2006.01)
 C23C 16/455(2006.01)
(52) Cooperative Patent Classification (CPC):
C07F 7/21; C23C 16/45553; C23C 16/401
(86) International application number:
PCT/US2020/052635
(87) International publication number:
WO 2021/201910 (07.10.2021 Gazette 2021/40)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 02.04.2020 US 202016838997
23.09.2020 US 202017030187

(71) Applicant: Versum Materials US, LLC
Tempe, AZ 85284 (US)

(72) Inventors:
  • MACDONALD, Matthew R.
    Tempe, AZ 85284 (US)
  • LEHMANN, John J.
    Tempe, AZ 85284 (US)

(74) Representative: Sommer, Andrea 
Andrea Sommer Patentanwälte PartG mbB Uhlandstraße 2
80336 München
80336 München (DE)

   


(54) ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS