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(11)

EP 4 111 132 A1

(12)

(43) Date of publication: 04.01.2023 Bulletin 2023/01 (21) Application number: 21706841.0 (22) Date of filing: 28.01.2021

(51) International Patent Classification (IPC):  G01B 9/02(2022.01) G03F 7/20(2006.01) G01B 11/00(2006.01) (52) Cooperative Patent Classification (CPC): G01B 2290/15; G01B 2290/25; G01B 9/02061; G01B 11/002; G01B 9/02057; G01B 9/0205; G01B 9/02018; G03F 7/7085; G03F 7/70775 (86) International application number: PCT/EP2021/051901 (87) International publication number: WO 2021/170333 (02.09.2021 Gazette 2021/35)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 25.02.2020 EP 20159279 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventors: LIEDECKE, Christian 5500 AH Veldhoven (NL) BAGGEN, Marcel, Koenraad, Marie 5500 AH Veldhoven (NL) JANSEN, Maarten, Jozef 5500 AH Veldhoven (NL) MRIDHA, Manoj Kumar 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)