(19)
(11) EP 4 115 441 A1

(12)

(43) Date of publication:
11.01.2023 Bulletin 2023/02

(21) Application number: 21721647.2

(22) Date of filing: 26.02.2021
(51) International Patent Classification (IPC): 
H01J 65/04(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 65/04
(86) International application number:
PCT/RU2021/050049
(87) International publication number:
WO 2021/177859 (10.09.2021 Gazette 2021/36)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 05.03.2020 RU 2020109782
10.03.2020 US 202016814317

(71) Applicants:
  • RnD-ISAN, Ltd.
    Moscow 108841 (RU)
  • ISTEQ B.V.
    5656 AE Eindhoven (NL)

(72) Inventors:
  • ABRAMENKO, Dmitry Borisovich
    Moscow, 129128 (RU)
  • GAYASOV, Robert Rafilevich
    Moscow, 108840 (RU)
  • KRIVTSUN, Vladimir Mikhailovich
    Moscow, 108841 (RU)
  • LASH, Aleksandr Andreevich
    Moscow, 127051 (RU)
  • KIRYUKHIN, Yurii Borisovich
    Moscow, 108841 (RU)
  • GLUSHKOV, Denis Alexandrovich
    3434KT Nieuwegein (NL)

(74) Representative: Knöner, Gregor et al
Kahler Käck Mollekopf Partnerschaft von Patentanwälten mbB Vorderer Anger 239
86899 Landsberg am Lech
86899 Landsberg am Lech (DE)

   


(54) LASER-PUMPED PLASMA LIGHT SOURCE AND PLASMA IGNITION METHOD