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(11)

EP 4 122 005 A1

(12)

(43) Date of publication: 25.01.2023 Bulletin 2023/04 (21) Application number: 20925671.8 (22) Date of filing: 26.03.2020

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) H01L 21/673(2006.01) H01L 21/677(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/67754; H01L 21/67742; H01L 21/68742; H01L 21/68771; H01L 21/68764 (86) International application number: PCT/US2020/024947 (87) International publication number: WO 2021/188122 (23.09.2021 Gazette 2021/38)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 20.03.2020 US 202062992690 P (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: KURITA, Shinichi Santa Clara, California 95054 (US) ABE, Shinobu Osaka, Osaka 530--0001 (JP) SHIN, Chang Hee Santa Clara, California 95054 (US) KOWAKA, Masahiko Osaka, Osaka 530--0001 (JP) CHAE, Yong Kee Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)