(19)
(11) EP 4 127 260 A1

(12)

(43) Date of publication:
08.02.2023 Bulletin 2023/06

(21) Application number: 20715808.0

(22) Date of filing: 26.03.2020
(51) International Patent Classification (IPC): 
C23C 14/24(1985.01)
 C30B 23/06(1980.01)
(52) Cooperative Patent Classification (CPC):
C30B 23/066; C23C 14/243
(86) International application number:
PCT/EP2020/058601
(87) International publication number:
WO 2021/190758 (30.09.2021 Gazette 2021/39)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventor:
  • SCHNAPPENBERGER, Frank
    63867 Johannesberg (DE)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) EVAPORATION SOURCE, DEPOSITION APPARATUS HAVING AN EVAPORATION SOURCE, AND METHODS THEREFOR