(19)
(11) EP 4 139 496 A1

(12)

(43) Date of publication:
01.03.2023 Bulletin 2023/09

(21) Application number: 21721160.6

(22) Date of filing: 14.04.2021
(51) International Patent Classification (IPC): 
C23C 16/44(2006.01)
F04D 29/02(2006.01)
F04D 19/04(2006.01)
(52) Cooperative Patent Classification (CPC):
F04D 19/042; F04D 29/023; F05D 2230/90; C23C 16/4412
(86) International application number:
PCT/GB2021/050897
(87) International publication number:
WO 2021/214427 (28.10.2021 Gazette 2021/43)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 23.04.2020 GB 202005964

(71) Applicant: Edwards Limited
Burgess Hill, Sussex RH15 9TW (GB)

(72) Inventor:
  • RUDGE, Oliver James
    Burgess Hill Sussex RH15 9TW (GB)

(74) Representative: Totman, Clare Elizabeth 
Edwards Limited Innovation Drive
Burgess Hill, West Sussex RH15 9TW
Burgess Hill, West Sussex RH15 9TW (GB)

   


(54) HIGH VACUUM PUMPS THEIR METHOD OF MANUFACTURE AND USE