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EP 4 143 882 A1

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(43) Date of publication: 08.03.2023 Bulletin 2023/10 (21) Application number: 21721551.6 (22) Date of filing: 28.04.2021

(51) International Patent Classification (IPC):  H01L 27/11582(2017.01) H01L 27/11548(2017.01) C23C 18/34(2006.01) H01L 27/11556(2017.01) H01L 27/11575(2017.01) C23C 18/36(2006.01) (52) Cooperative Patent Classification (CPC): C23C 18/31; C23C 18/34; C23C 18/36; C23C 18/1879; C23C 18/1653; C25D 3/38; C23C 18/1608; C23C 18/1612; H10B 41/50; H10B 41/27; H10B 43/50; H10B 43/27 (86) International application number: PCT/EP2021/061174 (87) International publication number: WO 2021/219744 (04.11.2021 Gazette 2021/44)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 29.04.2020 FR 2004260 19.01.2021 FR 2100492 (71) Applicant: Aveni 91400 Saclay (FR)	(72) Inventors: SUHR, Dominique 92290 CHATENAY-MALABRY (FR) MEVELLEC, Vincent 92100 BOULOGNE (FR) THIAM, Mikaïlou 94240 L'HAY-LES-ROSES (FR) (74) Representative: Cabinet Beau de Loménie  158, rue de l'Université 75340 Paris Cedex 07 75340 Paris Cedex 07 (FR)