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(11)

EP 4 154 318 A1

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(43) Date of publication: 29.03.2023 Bulletin 2023/13 (21) Application number: 20734907.7 (22) Date of filing: 25.06.2020

(51) International Patent Classification (IPC):  H01L 29/06(2006.01) H01L 29/423(2006.01) H01L 21/8238(2006.01) H01L 21/336(2006.01) B82Y 10/00(2011.01) H01L 29/775(2006.01) H01L 27/088(2006.01) (52) Cooperative Patent Classification (CPC): H01L 29/0673; B82Y 10/00; H01L 29/42392; H01L 29/66439; H01L 29/775; H01L 27/088; H01L 21/823412; H01L 29/78696 (86) International application number: PCT/EP2020/067773 (87) International publication number: WO 2021/259478 (30.12.2021 Gazette 2021/52)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Huawei Technologies Co., Ltd. Longgang District, Shenzhen, Guangdong 518129 (CN)	(72) Inventor: BADAROGLU, Mustafa 80992 Munich (DE) (74) Representative: Grünecker Patent- und Rechtsanwälte PartG mbB  Leopoldstraße 4 80802 München 80802 München (DE)