(19)
(11) EP 4 158 700 A1

(12)

(43) Date of publication:
05.04.2023 Bulletin 2023/14

(21) Application number: 20729722.7

(22) Date of filing: 29.05.2020
(51) International Patent Classification (IPC): 
H01L 41/09(2006.01)
H04R 17/00(2006.01)
(52) Cooperative Patent Classification (CPC):
H04R 2201/003; H04R 17/00; H10N 30/2044; H10N 30/2046
(86) International application number:
PCT/EP2020/064945
(87) International publication number:
WO 2021/239243 (02.12.2021 Gazette 2021/48)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicants:
  • Huawei Technologies Co., Ltd.
    Longgang District, Shenzhen, Guangdong 518129 (CN)
  • University Of Southampton
    Southampton SO17 1BJ (GB)

(72) Inventors:
  • HOFFMANN, Falk-Martin
    Southampton University Road Southampton SO17 1BJ (GB)
  • FAZI, Filippo, Maria
    Southampton University Road Southampton SO17 1BJ (GB)
  • WHITE, Neil
    Southampton University Road Southampton SO17 1BJ (GB)
  • HOLLAND, Keith
    Southampton University Road Southampton SO17 1BJ (GB)
  • HARRIS, Nick
    Southampton University Road Southampton SO17 1BJ (GB)
  • FONTANA, Simone
    80992 Munich (DE)
  • GROSCHE, Peter
    80992 Munich (DE)

(74) Representative: Thun, Clemens 
Mitscherlich PartmbB Patent- und Rechtsanwälte Sonnenstraße 33
80331 München
80331 München (DE)

   


(54) MEMS ACTUATION DEVICE AND METHOD