(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
29.05.2020 US 202063032187 P
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(71) |
Applicant: ASML Netherlands B.V. |
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5500 AH Veldhoven (NL) |
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(72) |
Inventors: |
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- SWERDLOW, Ethan, Marcus
San Diego, California 92127 (US)
- BESSEMS, David
San Diego, California 92127 (US)
- TEDROW, Jon, David
San Diego, California 32127 (US)
- RAI, Sandeep
San Diego, California 92127 (US)
- CAVALIER, Grant, Steven
San Diego, California 92127 (US)
- DRIESSEN, Theodorus, Wilhelmus
San Diego, California 92127 (US)
- SAMS, Benjamin, Andrew
San Diego, California 92127 (US)
- TREES, Dietmar, Uwe, Herbert
San Diego, California 92127 (US)
- ATENCIO, Edgardo, Zamora
San Diego, California 92127 (US)
- JOHNSON, Brandon, Michael
San Diego, California 92127 (US)
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(74) |
Representative: ASML Netherlands B.V. |
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Corporate Intellectual Property
P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL) |
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