(19)

(11)

EP 4 162 095 A1

(12)

(43) Date of publication: 12.04.2023 Bulletin 2023/15 (21) Application number: 21733576.9 (22) Date of filing: 08.06.2021

(51) International Patent Classification (IPC):  C23C 16/44(2006.01) C23C 16/455(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/45548; C23C 16/4412; C23C 16/45576; C23C 16/45595; C23C 16/45551; C23C 16/45574; C23C 16/45506 (86) International application number: PCT/NL2021/050364 (87) International publication number: WO 2021/251821 (16.12.2021 Gazette 2021/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 08.06.2020 NL 2025783 (71) Applicant: Sald IP B.V. 5651 CA Eindhoven (NL)	(72) Inventors: HEMERIK, Marcel Maurice 5651 CA Eindhoven (NL) VAN DE VELDEN, Marinus Adrianus Elizabeth 5651 CA Eindhoven (NL) KREMERS, Erik Antonius Franciscus 5651 CA Eindhoven (NL) (74) Representative: V.O.  P.O. Box 87930 2508 DH Den Haag 2508 DH Den Haag (NL)