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(11)

EP 4 173 047 A1

(12)

(43) Date of publication: 03.05.2023 Bulletin 2023/18 (21) Application number: 21737021.2 (22) Date of filing: 24.06.2021

(51) International Patent Classification (IPC):  H01L 27/30(2006.01) H01L 31/0392(2006.01) H01L 31/048(2014.01) H01L 31/0725(2012.01) H01L 31/046(2014.01) H01L 25/04(2023.01) H01L 51/42(2006.01) H01L 31/043(2014.01) H01L 31/0687(2012.01) H01L 31/0224(2006.01) H01L 31/0463(2014.01) (52) Cooperative Patent Classification (CPC): H01L 31/043; H01L 31/048; H01L 31/03923; H01L 31/0687; H01L 31/0463; H01L 31/046; H01L 31/022425; H01L 25/043; H01L 31/0725; Y02E 10/544; Y02E 10/541; Y02E 10/549; H10K 30/57; H10K 30/211 (86) International application number: PCT/EP2021/067273 (87) International publication number: WO 2021/260084 (30.12.2021 Gazette 2021/52)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 26.06.2020 SE 2050778 (71) Applicant: Evolar AB 756 51 Uppsala (SE)	(72) Inventors: WALLIN, Erik 755 98 Uppsala (SE) LUNDBERG, Olle 752 60 Uppsala (SE) STOLT, Lars 755 91 Uppsala (SE) (74) Representative: Keijser Bergöö, Malin Katarina  Rouse AB Docketing, PO Box 42 683 21 Hagfors 683 21 Hagfors (SE)