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(11)

EP 4 179 301 A1

(12)

(43) Date of publication: 17.05.2023 Bulletin 2023/20 (21) Application number: 21746110.2 (22) Date of filing: 08.07.2021

(51) International Patent Classification (IPC):  G01N 23/2208(2018.01) G01N 23/2252(2018.01) H01J 37/244(2006.01) (52) Cooperative Patent Classification (CPC): G01N 2223/079; G01N 2223/402; G01N 2223/418; G01N 23/2208; H01J 37/244; H01J 2237/2442; H01J 2237/2446 (86) International application number: PCT/GB2021/051752 (87) International publication number: WO 2022/008924 (13.01.2022 Gazette 2022/02)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 09.07.2020 GB 202010590 29.07.2020 GB 202011809 (71) Applicant: Oxford Instruments Nanotechnology Tools Limited Abingdon, Oxon OX13 5QX (GB)	(72) Inventors: BURGESS, Simon Wycombe Buckinghamshire HP12 3SE (GB) BHADARE, Santokh Wycombe Buckinghamshire HP12 3SE (GB) TYRRELL, Chris Wycombe Buckinghamshire HP12 3SE (GB) STATHAM, Peter Wycombe Buckinghamshire HP12 3SE (GB) (74) Representative: Gill Jennings & Every LLP  The Broadgate Tower 20 Primrose Street London EC2A 2ES London EC2A 2ES (GB)