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EP 4 179 562 A1

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(43) Date of publication: 17.05.2023 Bulletin 2023/20 (21) Application number: 21837680.4 (22) Date of filing: 09.07.2021

(51) International Patent Classification (IPC):  H01J 49/16(2006.01) H01J 49/42(2006.01) H01J 49/24(2006.01) (52) Cooperative Patent Classification (CPC): H01J 49/42; H01J 49/24; H01J 49/16; H01J 49/164 (86) International application number: PCT/US2021/041143 (87) International publication number: WO 2022/011290 (13.01.2022 Gazette 2022/02)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 09.07.2020 US 202063049842 P (71) Applicants: Duke University Durham, NC 27705 (US) Coldquanta, Inc. Boulder, Colorado 80301 (US)

(72) Inventors: KIM, Jungsang Chapel Hill, North Carolina 27516 (US) VRIJSEN, Geert Durham, North Carolina 27705 (US) INLEK, Ismail Durham, North Carolina 27705 (US) NOEL, Tom Boulder, Colorado 80301-2338 (US) IVORY, Megan Boulder, Colorado 80301-2338 (US) KATO, Alexander Boulder, Colorado 80301-2338 (US) HUGHES, Steve Boulder, Colorado 80301-2338 (US) (74) Representative: Blumbach · Zinngrebe Patentanwälte PartG mbB  Elisabethenstrasse 11 64283 Darmstadt 64283 Darmstadt (DE)