(19)
(11) EP 4 180 796 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
11.06.2025 Bulletin 2025/24

(45) Mention of the grant of the patent:
30.04.2025 Bulletin 2025/18

(21) Application number: 21207842.2

(22) Date of filing: 11.11.2021
(51) International Patent Classification (IPC): 
G01N 21/41(2006.01)
 G01N 21/552(2014.01)
(52) Cooperative Patent Classification (CPC):
G01N 21/4133; G01N 21/554

(54)

REFRACTIVE INDEX SENSOR DEVICE

BRECHUNGSINDEX-SENSORVORRICHTUNG

DISPOSITIF DE CAPTEUR D'INDICE DE RÉFRACTION

(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

(43) Date of publication of application:
17.05.2023 Bulletin 2023/20

(73) Proprietors:
  • IHP GmbH - Leibniz Institute for High Performance Microelectronics/ Leibniz-Institut für innovative Mikroelektronik
    15236 Frankfurt (Oder) (DE)
  • Brandenburgische Technische Universität Cottbus-Senftenberg
    03046 Cottbus (DE)

(72) Inventors:
  • MAI, Christian
    15236 Frankfurt (Oder) (DE)
  • SPIRITO, Davide
    15236 Frankfurt (Oder) (DE)
  • REITER, Sebastian
    03046 Cottbus (DE)
  • FISCHER, Inga
    03046 Cottbus (DE)

(74) Representative: Eisenführ Speiser 
Patentanwälte Rechtsanwälte PartGmbB Stralauer Platz 34
10243 Berlin
10243 Berlin (DE)


(56) References cited: : 
WO-A1-2009/112288
   
  • AUGEL L ET AL: "An Integrated Plasmonic Refractive Index Sensor: Al nanohole arrays on Ge PIN photodiodes", 2017 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), IEEE, 2 December 2017 (2017-12-02), XP033306110, DOI: 10.1109/IEDM.2017.8268528
  • AUGEL L ET AL: "Integrated collinear refractive index sensor with Ge PIN photodiodes", ARXIV.ORG, CORNELL UNIVERSITY LIBRARY, 201 OLIN LIBRARY CORNELL UNIVERSITY ITHACA, NY 14853, 4 February 2019 (2019-02-04), XP081024935, DOI: 10.1021/ACSPHOTONICS.8B01067
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).