(19)

(11)

EP 4 186 099 A2

(12)

(88) Date of publication A3: 10.03.2022 (43) Date of publication: 31.05.2023 Bulletin 2023/22 (21) Application number: 21752332.3 (22) Date of filing: 14.07.2021

(51) International Patent Classification (IPC):  H01L 29/08(2006.01) H01L 29/78(2006.01) H01L 29/872(2006.01) H01L 29/16(2006.01) H01L 29/861(2006.01) (52) Cooperative Patent Classification (CPC): H01L 29/1608; H01L 29/7802; H01L 29/861; H01L 29/872; H01L 29/0878; H01L 29/36 (86) International application number: PCT/US2021/041532 (87) International publication number: WO 2022/020147 (27.01.2022 Gazette 2022/04)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 24.07.2020 US 202016938032 (71) Applicant: Wolfspeed, Inc. Durham, NC 27703 (US)	(72) Inventors: LICHTENWALNER, Daniel, Jenner Raleigh, North Carolina 27603 (US) RYU, Sei-Hyung Cary, North Carolina 27513 (US) HAN, Kijeong Apex, North Carolina 27502 (US) VAN BRUNT, Edward, Robert Raleigh, North Carolina 27606 (US) (74) Representative: Boult Wade Tennant LLP  Salisbury Square House 8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB)