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(11)

EP 4 189 741 A1

(12)

(43) Date of publication: 07.06.2023 Bulletin 2023/23 (21) Application number: 20760405.9 (22) Date of filing: 17.08.2020

(51) International Patent Classification (IPC):  H01L 25/00(2006.01) H01L 21/683(2006.01) H01L 21/56(2006.01) H01L 25/03(2006.01) H01L 23/00(2006.01) H01L 23/31(2006.01) (52) Cooperative Patent Classification (CPC): H01L 2224/94; H01L 2924/18162; H01L 2224/04105; H01L 2224/214; H01L 2224/12105; H01L 24/19; H01L 2224/16227; H01L 2224/96; H01L 21/561; H01L 21/568; H01L 21/6835; H01L 2221/68327; H01L 2221/68345; H01L 23/3171; H01L 25/50; H01L 25/03   C-Sets: H01L 2224/94, H01L 2224/214; (86) International application number: PCT/EP2020/072972 (87) International publication number: WO 2022/037754 (24.02.2022 Gazette 2022/08)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Huawei Technologies Co., Ltd. Shenzhen, Guangdong 518129 (CN)	(72) Inventor: CHEN, Wu 80992 Munich (DE) (74) Representative: Grünecker Patent- und Rechtsanwälte PartG mbB  Leopoldstraße 4 80802 München 80802 München (DE)