(19)
(11) EP 4 193 385 A1

(12)

(43) Date of publication:
14.06.2023 Bulletin 2023/24

(21) Application number: 21854160.5

(22) Date of filing: 26.07.2021
(51) International Patent Classification (IPC): 
H01J 65/04(2006.01)
H01J 61/12(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 65/04; H01J 61/16
(86) International application number:
PCT/RU2021/050241
(87) International publication number:
WO 2022/031190 (10.02.2022 Gazette 2022/06)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 06.08.2020 RU 2020126279

(71) Applicants:
  • ISTEQ B.V.
    5656 AE Eindhoven (NL)
  • ISTEQ GROUP HOLDING B.V.
    5656 AE Eindhoven (NL)

(72) Inventors:
  • LASH, Aleksandr Andreevich
    Moscow 127051 (RU)
  • GAYASOV, Robert Rafilevich
    Moscow 108840 (RU)
  • GLUSHKOV, Denis Alexandrovich
    Moscow 108841 (RU)
  • KIRYUKHIN, Yurii Borisovich
    Moscow 108841 (RU)
  • KRIVTSUN, Vladimir Mikhailovich
    Troitsk Moscow 108840 (RU)

(74) Representative: Knöner, Gregor et al
Kahler Käck Mollekopf Partnerschaft von Patentanwälten mbB Vorderer Anger 239
86899 Landsberg am Lech
86899 Landsberg am Lech (DE)

   


(54) LASER-PUMPED PLASMA LIGHT SOURCE AND METHOD FOR LIGHT GENERATION