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EP 4 204 353 A1

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(43) Date of publication: 05.07.2023 Bulletin 2023/27 (21) Application number: 21862981.4 (22) Date of filing: 31.08.2021

(51) International Patent Classification (IPC):  B81C 1/00(2006.01) H01L 41/04(2006.01) H03H 9/205(2006.01) B81B 3/00(2006.01) H01L 41/332(2013.01) H03H 9/56(2006.01) (52) Cooperative Patent Classification (CPC): H03H 9/02228; H03H 9/174; H03H 9/568; H03H 3/02; H03H 2003/023 (86) International application number: PCT/US2021/048505 (87) International publication number: WO 2022/047406 (03.03.2022 Gazette 2022/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 31.08.2020 US 202063072595 P 05.10.2020 US 202063087792 P 17.12.2020 US 202017125960 25.12.2020 US 202017134213 (71) Applicant: Murata Manufacturing Co., Ltd. Nagaokakyo-shi, Kyoto 617-8555 (JP)

(72) Inventors: TURNER, Patrick San Bruno, CA (US) JACHOWSKI, Doug Santa Cruz, CA (US) GARCIA, Bryant Burlingame, CA (US) (74) Representative: Zimmermann, Tankred Klaus et al Schoppe, Zimmermann, Stöckeler Zinkler, Schenk & Partner mbB Patentanwälte Radlkoferstrasse 2 81373 München 81373 München (DE)