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EP 4 204 599 A1

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(43) Date of publication: 05.07.2023 Bulletin 2023/27 (21) Application number: 21759163.5 (22) Date of filing: 25.08.2021

(51) International Patent Classification (IPC):  C23C 18/16(2006.01) C23C 18/36(2006.01) C23C 18/34(2006.01) C23C 18/18(2006.01) (52) Cooperative Patent Classification (CPC): C23C 18/34; C23C 18/36; C23C 18/1637; C23C 18/1844; C23C 18/1651 (86) International application number: PCT/IB2021/057786 (87) International publication number: WO 2022/043889 (03.03.2022 Gazette 2022/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 27.08.2020 LT 2020542 (71) Applicant: Valstybinis Moksliniu Tyrimu Institutas Fiziniu Ir Technologijos Mokslu Centras 02300 Vilnius (LT)	(72) Inventors: JAGMINIENE, Aldona 10320 Vilnius (LT) STANKEVICIENE, Ina 06139 Vilnius (LT) RATAUTAS, Karolis 11318 Vilnius (LT) NORKUS, Eugenijus 10221 Vilnius (LT) RACIUKAITIS, Gediminas 14195 Giluziu km. Avizieniu sen. (LT) (74) Representative: Draugeliene, Virgina Adolfina  Tarpine Ltd A. P. Kavoliuko g. 24-152 04328 Vilnius 04328 Vilnius (LT)