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(11)

EP 4 204 600 A1

(12)

(43) Date of publication: 05.07.2023 Bulletin 2023/27 (21) Application number: 21762062.4 (22) Date of filing: 26.08.2021

(51) International Patent Classification (IPC):  C23C 18/18(2006.01) C23C 18/38(2006.01) C23C 18/20(2006.01) (52) Cooperative Patent Classification (CPC): C23C 18/2086; C23C 18/1893; C23C 18/38 (86) International application number: PCT/EP2021/073578 (87) International publication number: WO 2022/043417 (03.03.2022 Gazette 2022/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 27.08.2020 EP 20193047 (71) Applicant: Atotech Deutschland GmbH & Co. KG 10553 Berlin (DE)	(72) Inventors: BEYER, André 10553 Berlin (DE) GREGORIADES, Laurence John 10553 Berlin (DE) KEMPA, Stefan 10553 Berlin (DE) LEHMANN, Julia 10553 Berlin (DE) WELZ, Yvonne 10553 Berlin (DE) (74) Representative: Atotech Deutschland GmbH & Co. KG  Intellectual Property Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)