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(11)

EP 4 204 601 A1

(12)

(43) Date of publication: 05.07.2023 Bulletin 2023/27 (21) Application number: 21766456.4 (22) Date of filing: 23.08.2021

(51) International Patent Classification (IPC):  C23C 18/24(2006.01) C08J 7/14(2006.01) C23C 18/16(2006.01) (52) Cooperative Patent Classification (CPC): C23C 18/24; C23C 18/1651; C23C 18/1653 (86) International application number: PCT/EP2021/073224 (87) International publication number: WO 2022/043241 (03.03.2022 Gazette 2022/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 25.08.2020 EP 20192718 (71) Applicant: Atotech Deutschland GmbH & Co. KG 10553 Berlin (DE)	(72) Inventors: DYRBUSCH, Brigitte 10553 Berlin (DE) FINN, Franziska 10553 Berlin (DE) FELS, Carl Christian 10553 Berlin (DE) (74) Representative: Atotech Deutschland GmbH & Co. KG  Intellectual Property Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)