(19)
(11) EP 4 214 350 A1

(12)

(43) Date of publication:
26.07.2023 Bulletin 2023/30

(21) Application number: 21869978.3

(22) Date of filing: 01.09.2021
(51) International Patent Classification (IPC): 
C23C 14/24(2006.01)
C23C 14/56(2006.01)
H01M 4/04(2006.01)
 C23C 14/22(2006.01)
C23C 14/14(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 14/14; C23C 14/243; C23C 14/246; C23C 14/562; Y02E 60/10
(86) International application number:
PCT/US2021/048677
(87) International publication number:
WO 2022/060570 (24.03.2022 Gazette 2022/12)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 18.09.2020 US 202017024882

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • BUSCHBECK, Wolfgang
    63454 Hanau (DE)
  • BANGERT, Stefan
    36396 Steinau (DE)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD