(19)
(11) EP 4 237 593 A1

(12)

(43) Date of publication:
06.09.2023 Bulletin 2023/36

(21) Application number: 20820783.7

(22) Date of filing: 28.10.2020
(51) International Patent Classification (IPC): 
C23C 14/24(2006.01)
H01L 51/00(2006.01)
 C23C 14/56(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 14/24; C23C 14/562; H10K 71/164
(86) International application number:
PCT/EP2020/080294
(87) International publication number:
WO 2022/089737 (05.05.2022 Gazette 2022/18)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • SCHNAPPENBERGER, Frank
    63867 Johannesberg (DE)
  • DEPPISCH, Thomas
    63743 Aschaffenburg (DE)
  • WOLFF, Susanne
    63801 Kleinostheim (DE)
  • BUSCHBECK, Wolfgang
    63454 Hanau (DE)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) DEPOSITION SOURCE, DEPOSITION APPARATUS FOR DEPOSITING EVAPORATED MATERIAL, AND METHODS THEREFOR