(19)

(11)

EP 4 237 686 A1

(12)

(43) Date of publication: 06.09.2023 Bulletin 2023/36 (21) Application number: 21805625.7 (22) Date of filing: 26.10.2021

(51) International Patent Classification (IPC):  F04B 37/08(2006.01) F04B 53/10(2006.01) F04B 37/14(2006.01) (52) Cooperative Patent Classification (CPC): F04B 37/08; F04B 37/14; F04B 53/1077 (86) International application number: PCT/IB2021/059877 (87) International publication number: WO 2022/090923 (05.05.2022 Gazette 2022/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 02.11.2020 GB 202017345 (71) Applicant: Edwards Vacuum LLC Sanborn, NY 14132 (US)	(72) Inventor: CASELLO, John Chelmsford, Massachusetts 01824 (US) (74) Representative: Norton, Ian Andrew  Edwards Limited Innovation Drive Burgess Hill, West Sussex RH15 9TW Burgess Hill, West Sussex RH15 9TW (GB)