(19)
(11) EP 4 244 676 A1

(12)

(43) Date of publication:
20.09.2023 Bulletin 2023/38

(21) Application number: 21801928.9

(22) Date of filing: 29.10.2021
(51) International Patent Classification (IPC): 
G03F 7/20(2006.01)
G02B 26/08(2006.01)
G02B 7/18(2021.01)
(52) Cooperative Patent Classification (CPC):
G02B 26/0825; G03F 7/70266; G03F 7/70891; G03F 7/70958; G02B 27/0031
(86) International application number:
PCT/EP2021/080204
(87) International publication number:
WO 2022/101039 (19.05.2022 Gazette 2022/20)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 11.11.2020 EP 20206889
29.01.2021 EP 21154172

(71) Applicant: ASML Netherlands B.V.
5500 AH Veldhoven (NL)

(72) Inventor:
  • VAN DEN BRINK, Marinus, Aart
    5500 AH Veldhoven (NL)

(74) Representative: ASML Netherlands B.V. 
Corporate Intellectual Property P.O. Box 324
5500 AH Veldhoven
5500 AH Veldhoven (NL)

   


(54) A METHOD AND APPARATUS FOR THERMALLY DEFORMING AN OPTICAL ELEMENT