(19)

(11)

EP 4 244 676 A1

(12)

(43) Date of publication: 20.09.2023 Bulletin 2023/38 (21) Application number: 21801928.9 (22) Date of filing: 29.10.2021

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) G02B 26/08(2006.01) G02B 7/18(2021.01) (52) Cooperative Patent Classification (CPC): G02B 26/0825; G03F 7/70266; G03F 7/70891; G03F 7/70958; G02B 27/0031 (86) International application number: PCT/EP2021/080204 (87) International publication number: WO 2022/101039 (19.05.2022 Gazette 2022/20)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 11.11.2020 EP 20206889 29.01.2021 EP 21154172 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventor: VAN DEN BRINK, Marinus, Aart 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)