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EP 4 248 002 A1

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(43) Date of publication: 27.09.2023 Bulletin 2023/39 (21) Application number: 21811073.2 (22) Date of filing: 19.11.2021

(51) International Patent Classification (IPC):  C30B 35/00(2006.01) C30B 23/02(2006.01) C30B 29/36(2006.01) C30B 23/00(2006.01) (52) Cooperative Patent Classification (CPC): C30B 23/02; C30B 29/36; C30B 35/00; H01L 21/02529; H01L 21/02631; C30B 23/005; F27B 14/00 (86) International application number: PCT/EP2021/082331 (87) International publication number: WO 2022/106635 (27.05.2022 Gazette 2022/21)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 19.11.2020 EP 20208651 11.12.2020 DE 102020215755 (71) Applicant: Zadient Technologies SAS 73800 Sainte-Hélène-du-Lac (FR)	(72) Inventors: CERAN, Kagan 73190 Saint Baldoph (FR) MARSAN, Didier 73190 Saint Baldoph (FR) SYRKIN, Alexander 80538 Munich (DE) BENAMARA, Omar 69008 Lyon (FR) JEBARA, Moaine 44300 Nantes (FR) (74) Representative: Kehl, Ascherl, Liebhoff & Ettmayr Patentanwälte Partnerschaft mbB  Emil-Riedel-Straße 18 80538 München 80538 München (DE)