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(11)

EP 4 251 721 A1

(12)

(43) Date of publication: 04.10.2023 Bulletin 2023/40 (21) Application number: 21811087.2 (22) Date of filing: 23.11.2021

(51) International Patent Classification (IPC):  C11D 1/00(2006.01) C23C 18/24(2006.01) C23C 18/20(2006.01) C23C 18/30(2006.01) (52) Cooperative Patent Classification (CPC): C23C 18/2086; C23C 18/24; C23C 18/30 (86) International application number: PCT/EP2021/082572 (87) International publication number: WO 2022/112196 (02.06.2022 Gazette 2022/22)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 24.11.2020 EP 20209518 (71) Applicant: Atotech Deutschland GmbH & Co. KG 10553 Berlin (DE)	(72) Inventors: BAYER, Frank 10553 Berlin (DE) FELS, Carl Christian 10553 Berlin (DE) HARTMANN, Philip 10553 Berlin (DE) (74) Representative: Atotech Deutschland GmbH & Co. KG  Intellectual Property Erasmusstraße 20 10553 Berlin 10553 Berlin (DE)