(19)

(11)

EP 4 256 100 A1

(12)

(43) Date of publication: 11.10.2023 Bulletin 2023/41 (21) Application number: 21824529.8 (22) Date of filing: 02.12.2021

(51) International Patent Classification (IPC):  C23C 14/02(2006.01) C23C 16/44(2006.01) H01L 21/683(2006.01) C23C 14/50(2006.01) H01J 37/32(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/025; C23C 14/50; C23C 16/4404; H01J 37/32697; H01J 37/32715; H01L 21/6831; H01L 21/68757 (86) International application number: PCT/EP2021/084017 (87) International publication number: WO 2022/117746 (09.06.2022 Gazette 2022/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 02.12.2020 US 202063120497 P (71) Applicant: Oerlikon Surface Solutions AG, Pfäffikon 8808 Pfäffikon (CH)	(72) Inventor: KIRK, Matthew Paul Lockport, New York 14094 (US) (74) Representative: Heine-Kempkens, Claus  Oerlikon Surface Solutions AG Pfäffikon 8808 Pfäffikon, SZ 8808 Pfäffikon, SZ (CH)