(19)

(11)

EP 4 256 410 A1

(12)

(43) Date of publication: 11.10.2023 Bulletin 2023/41 (21) Application number: 21820295.0 (22) Date of filing: 18.11.2021

(51) International Patent Classification (IPC):  G05B 19/418(2006.01) H01L 21/67(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/67276; G05B 19/41875; G05B 2219/45031; G05B 2219/32201; G05B 2219/32187; G05B 2219/32188; G05B 2219/33002; G05B 2219/32194; G05B 2219/32191 (86) International application number: PCT/FI2021/050784 (87) International publication number: WO 2022/117912 (09.06.2022 Gazette 2022/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 03.12.2020 FI 20206244 (71) Applicant: Elisa Oyj 00520 Helsinki (FI)	(72) Inventors: SALMENKAITA, Jukka-Pekka 00520 Helsinki (FI) HEIKKILÄ, Rasmus 00520 Helsinki (FI) (74) Representative: Espatent Oy  Kaivokatu 10 D 00100 Helsinki 00100 Helsinki (FI)