(19)
(11) EP 4 256 599 A1

(12)

(43) Date of publication:
11.10.2023 Bulletin 2023/41

(21) Application number: 21824057.0

(22) Date of filing: 04.12.2021
(51) International Patent Classification (IPC): 
H01J 37/22(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 2237/2808; H01J 37/228; H01J 2237/2817
(86) International application number:
PCT/IB2021/061339
(87) International publication number:
WO 2022/118294 (09.06.2022 Gazette 2022/23)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 04.12.2020 US 202063121752 P
29.11.2021 US 202117537422

(71) Applicant: Attolight AG
1015 Lausanne (CH)

(72) Inventors:
  • FOUCHIER, Marc
    1015 Lausanne (CH)
  • MONACHON, Christian
    1015 Lausanne (CH)

(74) Representative: Hoffmann Eitle 
Patent- und Rechtsanwälte PartmbB Arabellastraße 30
81925 München
81925 München (DE)

   


(54) DISLOCATION TYPE AND DENSITY DISCRIMINATION IN SEMICONDUCTOR MATERIALS USING CATHODOLUMINESCENCE MEASUREMENTS