(19)

(11)

EP 4 259 845 A1

(12)

(43) Date of publication: 18.10.2023 Bulletin 2023/42 (21) Application number: 21904428.6 (22) Date of filing: 09.12.2021

(51) International Patent Classification (IPC):  C23C 16/34(2006.01) H01L 21/02(2006.01) C23C 16/455(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/34; C23C 16/45527; C23C 16/45557; H01L 21/28562; H01L 21/76843; H01L 21/28088 (86) International application number: PCT/US2021/062679 (87) International publication number: WO 2022/125820 (16.06.2022 Gazette 2022/24)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 10.12.2020 US 202063123733 P (71) Applicant: Eugenus, Inc. San Jose, CA 95134 (US)	(72) Inventors: CHO, Hyunchol San Jose, California 95134 (US) KIM, Hae Young San Jose, California 95134 (US) DHAMDHERE, Ajit San Jose, California 95134 (US) NIE, Bunsen B. San Jose, California 95134 (US) JUNG, Sung-Hoon San Jose, California 95134 (US) (74) Representative: Zacco Sweden AB  P.O. Box 5581 Löjtnantsgatan 21 114 85 Stockholm 114 85 Stockholm (SE)