(19)
(11) EP 4 264 376 A1

(12)

(43) Date of publication:
25.10.2023 Bulletin 2023/43

(21) Application number: 21839848.5

(22) Date of filing: 14.12.2021
(51) International Patent Classification (IPC): 
G03F 7/26(2006.01)
 G03F 7/38(2006.01)
(52) Cooperative Patent Classification (CPC):
G03F 7/26; G03F 7/38
(86) International application number:
PCT/EP2021/085640
(87) International publication number:
WO 2022/129015 (23.06.2022 Gazette 2022/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 17.12.2020 JP 2020209190

(71) Applicant: Merck Patent GmbH
64293 Darmstadt (DE)

(72) Inventors:
  • NAGAHARA, Tatsuro
    Kakegawa-shi, Shizuoka 437-1412 (JP)
  • YAMAMOTO, Kazuma
    Kakegawa-shi, Shizuoka 437-1412 (JP)

   


(54) METHOD FOR MANUFACTURING THICKENED RESIST PATTERN, THICKENING SOLUTION, AND METHOD FOR MANUFACTURING PROCESSED SUBSTRATE