(19)
(11) EP 4 264 693 A1

(12)

(43) Date of publication:
25.10.2023 Bulletin 2023/43

(21) Application number: 21840905.0

(22) Date of filing: 17.12.2021
(51) International Patent Classification (IPC): 
H01L 43/14(2006.01)
H01L 21/336(2006.01)
H01L 43/06(2006.01)
H01L 29/16(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 29/66045; H01L 29/1606; G01R 33/072; G01R 33/0094; H10N 52/80; H10N 52/01; H10N 52/101
(86) International application number:
PCT/EP2021/086642
(87) International publication number:
WO 2022/129606 (23.06.2022 Gazette 2022/25)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 18.12.2020 GB 202020131
28.05.2021 GB 202107674
23.06.2021 GB 202109011

(71) Applicant: Paragraf Limited
Somersham, Cambridgeshire PE28 3EB (GB)

(72) Inventors:
  • BAINES, Rosie
    Somersham, Cambridgeshire PE28 3EB (GB)
  • LEE, Lok Yi
    Somersham, Cambridgeshire PE28 3EB (GB)
  • GLASS, Hugh
    Somersham, Cambridgeshire PE28 3EB (GB)

(74) Representative: Boult Wade Tennant LLP 
Salisbury Square House 8 Salisbury Square
London EC4Y 8AP
London EC4Y 8AP (GB)

   


(54) METHOD OF PRODUCING A GRAPHENE ELECTRONIC DEVICE PRECURSOR