(19)

(11)

EP 4 281 249 A1

(12)

(43) Date of publication: 29.11.2023 Bulletin 2023/48 (21) Application number: 22743319.0 (22) Date of filing: 24.01.2022

(51) International Patent Classification (IPC):  B24B 37/20(2012.01) H01L 21/67(2006.01) B24B 37/24(2012.01) (52) Cooperative Patent Classification (CPC): B24B 37/205 (86) International application number: PCT/US2022/013511 (87) International publication number: WO 2022/159810 (28.07.2022 Gazette 2022/30)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 25.01.2021 US 202163141368 P (71) Applicant: CMC Materials, Inc. Aurora, IL 60504 (US)	(72) Inventors: LEFEVRE, Paul Andre Aurora, Illinois 60504 (US) MILLER, Dustin Aurora, Illinois 60504 (US) SNIDER, Gary Aurora, Illinois 60504 (US) BARROS, Carlos Aurora, Illinois 60504 (US) GALTO, Anthony Aurora, Illinois 60504 (US) (74) Representative: Barker Brettell LLP  100 Hagley Road Edgbaston Birmingham, West Midlands B16 8QQ Birmingham, West Midlands B16 8QQ (GB)