(19)
(11) EP 4 285 100 A1

(12)

(43) Date of publication:
06.12.2023 Bulletin 2023/49

(21) Application number: 21923502.5

(22) Date of filing: 27.12.2021
(51) International Patent Classification (IPC): 
G01N 21/21(2006.01)
G01J 3/00(2006.01)
G01J 4/00(2006.01)
G01N 21/35(2014.01)
G01J 3/12(2006.01)
G02F 1/35(2006.01)
(52) Cooperative Patent Classification (CPC):
G01J 1/58; G01J 3/2803; G02F 1/3528
(86) International application number:
PCT/US2021/010069
(87) International publication number:
WO 2022/164417 (04.08.2022 Gazette 2022/31)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 29.01.2021 US 202163143187 P
05.03.2021 US 202117300091
17.08.2021 US 202163259830 P

(71) Applicant: J.A. Woollam Co., Inc.
Lincoln, NE 68508 (US)

(72) Inventors:
  • HE, Ping
    Lincoln, Nebraska 68512 (US)
  • LIPHARDT, Martin M.
    Lincoln, Nebraska 68523 (US)
  • VAN DERSLICE, Jeremy A.
    Dwight, Nebraska 68635 (US)
  • HERZINGER, Craig M.
    Lincoln, Nebraska 68506 (US)
  • HALE, Jeffrey S.
    Lincoln, Nebraska (US)
  • GUENTHER, Brian D.
    Lincoln, Nebraska 68516 (US)
  • MEYER, Duane E.
    Nebraska (US)
  • SCHOECHE, Stefan
    Albany, NY 12203 (US)
  • WELCH, James D.
    Omaha, Nebraska 68124 (US)

(74) Representative: Beck Greener LLP 
Fulwood House 12 Fulwood Place
London WC1V 6HR
London WC1V 6HR (GB)

   


(54) REFLECTOMETER, SPECTROPHOTOMETER, ELLIPSOMETER AND POLARIMETER SYSTEMS INCLUDING A WAVELENGTH MODIFIER