GROUP III-NITRIDE HIGH-ELECTRON MOBILITY TRANSISTORS AND PROCESS FOR MAKING THE SAME - Patent 4292132

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EP 4 292 132 A1

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(43)	Date of publication:
	20.12.2023 Bulletin 2023/51

(21)	Application number: 22753113.4

(22)	Date of filing: 20.01.2022

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International Patent Classification (IPC):

H01L 29/778^(2006.01)

H01L 29/20^(2006.01)

(52)	Cooperative Patent Classification (CPC):
	H01L 29/7786; H01L 29/404; H01L 29/42316; H01L 29/2003; H01L 29/41758; H01L 29/66462; H01L 29/1075; H01L 29/0623

(86)	International application number:
	PCT/US2022/013085

(87)	International publication number:
	WO 2022/173571 (18.08.2022 Gazette 2022/33)

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA ME
	Designated Validation States:
	KH MA MD TN

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Priority:

10.02.2021 US 202117172669

(71)	Applicant: Wolfspeed, Inc.
	Durham, NC 27703 (US)

(72)	Inventors:
	SRIRAM, Saptharishi Cary, North Carolina 27513 (US) GUO, Jia Apex, North Carolina 27502 (US)

(74)	Representative: Boult Wade Tennant LLP
	Salisbury Square House 8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB)

(54)	GROUP III-NITRIDE HIGH-ELECTRON MOBILITY TRANSISTORS AND PROCESS FOR MAKING THE SAME