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(11)

EP 4 294 546 A1

(12)

(43) Date of publication: 27.12.2023 Bulletin 2023/52 (21) Application number: 22706411.0 (22) Date of filing: 16.02.2022

(51) International Patent Classification (IPC):  B01D 45/12(2006.01) B01D 50/20(2022.01) A47L 9/10(2006.01) F04B 37/14(2006.01) (52) Cooperative Patent Classification (CPC): B01D 45/12; B01D 50/20; F04B 37/14; F04B 39/16; F04B 53/20; F04C 25/02; F04C 18/344; F04C 29/0092 (86) International application number: PCT/IB2022/051365 (87) International publication number: WO 2022/175827 (25.08.2022 Gazette 2022/34)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 19.02.2021 WO PCT/CN2021/076800 (71) Applicant: Leybold (Tianjin) International Trade Co Ltd Tianjin 300400 (CN)	(72) Inventors: DESIRON, Andries 50968 Cologne (DE) DE BOCK, Andries Daniel Jozef 50968 Cologne (DE) SHI, Gary Tianjin 300400 (CN) YU, Alex Tianjin 300400 (CN) YANG, Chuanlei Tianjin 300400 (CN) (74) Representative: Arnold, Emily Anne  Edwards Limited Innovation Drive Burgess Hill, West Sussex RH15 9TW Burgess Hill, West Sussex RH15 9TW (GB)