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EP 4 294 960 A1

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(43) Date of publication: 27.12.2023 Bulletin 2023/52 (21) Application number: 22707950.6 (22) Date of filing: 11.02.2022

(51) International Patent Classification (IPC):  C23C 16/448(2006.01) C10L 3/04(2006.01) C23C 16/26(2006.01) F17C 11/00(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/26; C23C 16/448; C10L 3/04; F17C 11/002 (86) International application number: PCT/US2022/016103 (87) International publication number: WO 2022/177816 (25.08.2022 Gazette 2022/34)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 17.02.2021 US 202163150203 P 09.02.2022 US 202217667861 (71) Applicants: Praxair Technology, Inc. Danbury, CT 06810 (US) Samsung Electronics Co., Ltd. Gyeonggi-Do, 445-701 (KR)

(72) Inventors: SINHA, Ashwini, K. Amherst, NY 14051 (US) SONG, Xuemei Amherst, NY 14051 (US) KANE, William, S. Tonawanda, NY 14223 (US) CHO, Youn-Joung Hwaseong-si, Gyeonggi-do, 18448 (KR) CHUNG, Wonwoong Hwaseong-si, Gyeonggi-do, 18448 (KR) HAN, Yeonock Hwaseong-si, Gyeonggi-do, 18448 (KR) (74) Representative: Schwan Schorer & Partner mbB  Patentanwälte Bauerstraße 22 80796 München 80796 München (DE)