(19)
(11) EP 4 295 403 A1

(12)

(43) Date of publication:
27.12.2023 Bulletin 2023/52

(21) Application number: 21707247.9

(22) Date of filing: 22.02.2021
(51) International Patent Classification (IPC): 
H01L 25/075(2006.01)
 H01L 51/00(2006.01)
(52) Cooperative Patent Classification (CPC):
H10K 71/135; H10K 71/70
(86) International application number:
PCT/EP2021/054317
(87) International publication number:
WO 2022/174931 (25.08.2022 Gazette 2022/34)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • CELLERE, Giorgio
    36040 Torri di Quartesolo (IT)
  • FURIN, Valentina
    31100 Treviso (IT)
  • NG, Hou T.
    Campbell, California 95008 (US)
  • GALLIANI, Carlo
    20831 Seregno MB (IT)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) APPARATUS AND METHOD FOR INSPECTING A SUBSTRATE IN DISPLAY MANUFACTURE AND SYSTEM FOR PROCESSING A SUBSTRATE