(19)
(11) EP 4 295 416 A1

(12)

(43) Date of publication:
27.12.2023 Bulletin 2023/52

(21) Application number: 21706916.0

(22) Date of filing: 18.02.2021
(51) International Patent Classification (IPC): 
H01L 31/18(2006.01)
H01L 21/68(2006.01)
 B41F 15/26(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 21/68764; H01L 21/68771; H01L 21/6776; H01L 21/68; H01L 31/18; B41F 15/26; B41F 15/0881
(86) International application number:
PCT/EP2021/054020
(87) International publication number:
WO 2022/174904 (25.08.2022 Gazette 2022/34)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(71) Applicant: Applied Materials Italia S.R.L.
31048 San Biagio di Callalta (TV) (IT)

(72) Inventor:
  • GISLON, Daniele
    30036 Santa Maria di Sala - Venice (IT)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) TRANSPORTATION SYSTEM FOR TRANSPORTING TWO OR MORE SUBSTRATES, PRINTING APPARATUS FOR PRINTING ON TWO OR MORE SUBSTRATES, AND METHODS FOR PERFORMING SAME