(19)
(11) EP 4 298 264 A1

(12)

(43) Date of publication:
03.01.2024 Bulletin 2024/01

(21) Application number: 22708890.3

(22) Date of filing: 22.02.2022
(51) International Patent Classification (IPC): 
C23C 16/458(2006.01)
H01L 21/67(2006.01)
 C23C 16/52(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 16/4584; C23C 16/52; H01L 21/67248; H01L 21/68764; H01L 21/68771
(86) International application number:
PCT/EP2022/054422
(87) International publication number:
WO 2022/180047 (01.09.2022 Gazette 2022/35)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 24.02.2021 CH 1982021

(71) Applicant: Evatec AG
9477 Trübbach (CH)

(72) Inventors:
  • GEES, Silvio
    7310 Bad Ragaz (CH)
  • BASELGIA, Manuel
    7000 Chur (CH)
  • SANTOS, Nuno
    8890 Flums (CH)

(74) Representative: Troesch Scheidegger Werner AG 
Schwäntenmos 14
8126 Zumikon
8126 Zumikon (CH)

   


(54) SUBSTRATE PROCESSING APPARATUS FOR TEMPERATURE MEASUREMENT OF A MOVING SUBSTRATE AND METHOD OF MEASURING THE TEMPERATURE OF A MOVING SUBSTRATE