(19)

(11)

EP 4 302 320 A1

(12)

(43) Date of publication: 10.01.2024 Bulletin 2024/02 (21) Application number: 22763933.3 (22) Date of filing: 02.03.2022

(51) International Patent Classification (IPC):  H01L 21/28(2006.01) H01L 21/02(2006.01) H01L 29/51(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/67184; H01L 21/6719; H01L 21/67098; H01L 21/02304; H01L 21/02181; H01L 21/0228; H01L 21/02323; H01L 21/02329; H01L 21/0234; H01L 21/02175; H01L 21/28202; H01L 21/28185; H01L 29/513; H01L 29/517; H01L 29/518 (86) International application number: PCT/US2022/018427 (87) International publication number: WO 2022/187299 (09.09.2022 Gazette 2022/36)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 04.03.2021 US 202117192213 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: HUNG, Steven C.H. Santa Clara, California 95054 (US) DONG, Lin Santa Clara, California 95054 (US) COLOMBEAU, Benjamin Santa Clara, California 95054 (US) SWENBERG, Johanes F. Santa Clara, California 95054 (US) WANG, Linlin Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)