(19)
(11) EP 4 305 145 A1

(12)

(43) Date of publication:
17.01.2024 Bulletin 2024/03

(21) Application number: 22710616.8

(22) Date of filing: 08.03.2022
(51) International Patent Classification (IPC): 
C11D 3/37(2006.01)
C11D 11/00(2006.01)
(52) Cooperative Patent Classification (CPC):
C11D 3/3723; C11D 11/0047; C11D 3/3773; C09K 13/00
(86) International application number:
PCT/EP2022/055929
(87) International publication number:
WO 2022/189448 (15.09.2022 Gazette 2022/37)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 11.03.2021 JP 2021039100

(71) Applicant: Merck Patent GmbH
64293 Darmstadt (DE)

(72) Inventors:
  • KINUTA, Takafumi
    Kakegawa-shi, Shizuoka 437--1412 (JP)
  • NAGAHARA, Tatsuro
    Kakegawa-shi, Shizuoka 437--1412 (JP)

(74) Representative: Rippel, Hans Christoph 
Patentanwälte Isenbruck Bösl Hörschler PartG mbB Eastsite One Seckenheimer Landstrasse 4
68163 Mannheim
68163 Mannheim (DE)

   


(54) SUBSTRATE SURFACE TREATING SOLUTION, AND USING THE SAME, METHOD FOR MANUFACTURING CLEANED SUBSTRATE AND METHOD FOR MANUFACTURING DEVICE