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(11)

EP 4 314 792 A1

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(43) Date of publication: 07.02.2024 Bulletin 2024/06 (21) Application number: 22720091.2 (22) Date of filing: 18.03.2022

(51) International Patent Classification (IPC):  G01N 27/12(2006.01) (52) Cooperative Patent Classification (CPC): G01N 27/125; H01L 21/0259; H01L 21/02565; H01L 21/02568; H01L 21/02686; H01L 21/02683; H01L 21/02691; H01L 28/24; H01L 28/86 (86) International application number: PCT/US2022/020850 (87) International publication number: WO 2022/212084 (06.10.2022 Gazette 2022/40)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 30.03.2021 US 202117216729 (71) Applicant: Government of The United States as Represented By the Secretary of the Air Force Wright-Patterson AFB, Ohio 45433-7109 (US)

(72) Inventors: GLAVIN, Nicholas, R. Springboro, OH 45066 (US) BUSKOHL, Philip, R. Beavercreek, OH 45430 (US) GLIEBE, Kimberly, A. Mentor, OH 44060 (US) MURATORE, Christopher Kettering, OH 45409 (US) AUSTIN, Drake Beavercreek, OH 45431 (US) (74) Representative: Altmann Stößel Dick Patentanwälte PartG mbB  Theodor-Heuss-Anlage 2 68165 Mannheim 68165 Mannheim (DE)