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(11)

EP 4 315 409 A1

(12)

(43) Date of publication: 07.02.2024 Bulletin 2024/06 (21) Application number: 21933454.7 (22) Date of filing: 26.03.2021

(51) International Patent Classification (IPC):  H01L 23/00(2006.01) H01L 21/56(2006.01) H01L 23/14(2006.01) H01L 25/10(2006.01) (52) Cooperative Patent Classification (CPC): H01L 23/5389; H01L 23/147; H01L 25/0655 (86) International application number: PCT/US2021/024519 (87) International publication number: WO 2022/203690 (29.09.2022 Gazette 2022/39)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: HRL LABORATORIES, LLC Malibu, CA 90265 (US)	(72) Inventor: HERRAULT, Florian G. Malibu, California 90265 (US) (74) Representative: Lusinchi, Laurent Pierre  Ladas & Parry LLP Temple Chambers3-7 Temple AvenueLondon EC4Y 0DA Temple Chambers3-7 Temple AvenueLondon EC4Y 0DA (GB)