(19)

(11)

EP 4 324 018 A1

(12)

(43) Date of publication: 21.02.2024 Bulletin 2024/08 (21) Application number: 22721998.7 (22) Date of filing: 19.04.2022

(51) International Patent Classification (IPC):  H01L 21/02(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/0245; H01L 21/02488; H01L 21/02507; H01L 21/02532; H01L 29/66984; H01L 29/7613; H01L 29/1079; H01L 29/154; H01L 29/66977; B82Y 10/00 (86) International application number: PCT/US2022/025307 (87) International publication number: WO 2022/225901 (27.10.2022 Gazette 2022/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 21.04.2021 US 202117236329 21.04.2021 US 202117236289 (71) Applicant: Atomera Incorporated Los Gatos, CA 95032 (US)	(72) Inventors: HYTHA, Marek Brookline, Massachusetts 02446 (US) WEEKS, Keith Doran Chandler, Arizona 85224 (US) CODY, Nyles Wynn Tempe, Arizona 85284 (US) TAKEUCHI, Hideki San Jose, California 95129 (US) (74) Representative: Page White Farrer  Bedford House 21a John Street London WC1N 2BF London WC1N 2BF (GB)