(19)
(11) EP 4 331 017 A1

(12)

(43) Date of publication:
06.03.2024 Bulletin 2024/10

(21) Application number: 22735687.0

(22) Date of filing: 24.05.2022
(51) International Patent Classification (IPC): 
H01L 29/15(2006.01)
H01L 29/10(2006.01)
H01L 29/08(2006.01)
H01L 29/78(2006.01)
(52) Cooperative Patent Classification (CPC):
H01L 29/152; H01L 29/7833; H01L 29/1054; H01L 29/165; H01L 29/41783; H01L 29/0847; H01L 29/665; H01L 29/66628
(86) International application number:
PCT/US2022/030669
(87) International publication number:
WO 2022/251173 (01.12.2022 Gazette 2022/48)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 26.05.2021 US 202117330831
26.05.2021 US 202117330860

(71) Applicant: Atomera Incorporated
Los Gatos, CA 95032 (US)

(72) Inventors:
  • HYTHA, Marek
    Brookline, Massachusetts 02446 (US)
  • CODY, Nyles Wynn
    Tempe, Arizona 85284 (US)
  • WEEKS, Keith Doran
    Chandler, Arizona 85224 (US)

(74) Representative: Page White Farrer 
Bedford House 21a John Street
London WC1N 2BF
London WC1N 2BF (GB)

   


(54) SEMICONDUCTOR DEVICE INCLUDING SUPERLATTICE WITH O18 ENRICHED MONOLAYERS AND ASSOCIATED METHODS